Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781999 | Spot-size control in reflection-based and scatterometry-based X-ray metrology systems | — | 2023-10-10 |
| 11703464 | Small-angle x-ray scatterometry | Alex Dikopoltsev, Matthew Wormington, Yuri Vinshtein | 2023-07-18 |