Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842420 | Method and apparatus for adaptive alignment | Lingling PU | 2023-12-12 |
| 11791127 | System and method for bare wafer inspection | Joe Wang | 2023-10-17 |
| 11769317 | Fully automated SEM sampling system for e-beam image enhancement | Wentian ZHOU, Liangjiang YU, Teng Wang, Lingling PU | 2023-09-26 |
| 11756182 | Pattern grouping method based on machine learning | Zhaohui Guo, Ruoyu Zhu, Chuan Li | 2023-09-12 |
| 11756187 | Systems and methods of optimal metrology guidance | Lingling PU, Nan Zhao, Wentian ZHOU, Teng Wang, Ming Xu | 2023-09-12 |
| 11720030 | Low dose charged particle metrology system | Fei Wang, Kuo-Shih Liu | 2023-08-08 |
| 11694312 | Image enhancement for multi-layered structure in charged-particle beam inspection | Ruochong FEI, Lingling PU, Wentian ZHOU, Liangjiang YU, Bo Wang | 2023-07-04 |
| 11681279 | Method for enhancing the semiconductor manufacturing yield | — | 2023-06-20 |
| 11650576 | Knowledge recommendation for defect review | Cho H. Teh, Robeter Jian, YI-YING WANG, Shih-Tsung Chen, Jian-Min Liao +5 more | 2023-05-16 |