Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774869 | Method and system for determining overlay | Ruud Hendrikus Martinus Johannes Bloks, Hendrik Cornelis Anton Borger, Frederik Eduard De Jong, Siebe Landheer, Chung-Hsun Li +3 more | 2023-10-03 |
| 11687007 | Method for decision making in a semiconductor manufacturing process | Arnaud HUBAUX, Johan Franciscus Maria Beckers, Dylan John David Davies, Willem Richard Pongers, Ajinkya Ravindra Daware +7 more | 2023-06-27 |
| 11650511 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks | 2023-05-16 |
| 11630399 | Lithographic apparatus and method | Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino +3 more | 2023-04-18 |