Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650511 | Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Martijn Houben, Thibault Simon Mathieu Laurent, Hendrikus Johannes Marinus Van Abeelen, Sander Catharina Reinier Derks | 2023-05-16 |