Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804388 | Substrate processing apparatus and method | — | 2023-10-31 |
| 11798830 | Fast FOUP swapping with a FOUP handler | Jeroen Fluit | 2023-10-24 |
| 11735445 | Substrate processing apparatus for processing substrates | Chris G. M. de Ridder | 2023-08-22 |
| 11587815 | Vertical batch furnace assembly | Chris G. M. de Ridder | 2023-02-21 |