Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798830 | Fast FOUP swapping with a FOUP handler | Theodorus G.M. Oosterlaken | 2023-10-24 |
| 11629407 | Substrate processing apparatus and method for processing substrates | Dieter Pierreux, Werner Knaepen, Bert Jongbloed | 2023-04-18 |