Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842908 | Semiconductor processing chamber with filament lamps having nonuniform heat output | Shiva K.T. Rajavelu Muralidhar | 2023-12-12 |
| 11837494 | Substrate handling device with adjustable joints | Kihyun Kim, Rutvij Naik | 2023-12-05 |
| 11828707 | Method and apparatus for transmittance measurements of large articles | Shiva K.T. Rajavelu Muralidhar, Youness Alvandi-Tabrizi, John DiSanto | 2023-11-28 |
| D975665 | Susceptor shaft | Aniket PATIL | 2023-01-17 |