Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610774 | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process | Atsuki Fukazawa | 2023-03-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610774 | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process | Atsuki Fukazawa | 2023-03-21 |