Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699570 | System and method for hi-precision ion implantation | Supakit Charnvanichborikarn, Wei Zou, Hans-Joachim L. Gossmann, Qintao Zhang, Aseem K. Srivastava +1 more | 2023-07-11 |
| 11664192 | Temperature control for insertable target holder for solid dopant materials | Shreyansh Patel, Graham Wright, Daniel Alvarado, Daniel R. Tieger, Brian S. Gori +2 more | 2023-05-30 |