Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732345 | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber | Andreas Lopp | 2023-08-22 |
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Andreas Lopp, Dieter Haas | 2023-08-08 |
| 11713506 | Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof | Stefan Keller, Uwe Schussler, Jose Manuel DIEGUEZ-CAMPO, Byung Sung Kwak | 2023-08-01 |