Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732345 | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber | Stefan Bangert | 2023-08-22 |
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Stefan Bangert, Tommaso Vercesi, Daniele GISLON, Oliver Heimel, Dieter Haas | 2023-08-08 |