Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718904 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Stefan Bangert, Tommaso Vercesi, Daniele GISLON, Andreas Lopp, Dieter Haas | 2023-08-08 |