Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11739411 | Lattice coat surface enhancement for chamber components | Lit Ping LAM, Ian Ong | 2023-08-29 |
| 11721583 | Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules | Karthik Balakrishnan, Karthik Elumalai, Eng Sheng Peh | 2023-08-08 |