Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794305 | Platen surface modification and high-performance pad conditioning to improve CMP performance | Christopher Heung-Gyun Lee, Anand N. Iyer, Hyuen Karen Tran | 2023-10-24 |