Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2023-12-26 |
| 11664216 | ALD process and hardware with improved purge efficiency | Xiangxin Rui | 2023-05-30 |