Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2023-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2023-12-26 |