Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Palash Joshi, Moin Ahmed Khan +5 more | 2023-12-19 |
| 11662317 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Byung Sung Kwak, Todd Egan, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2023-05-30 |
| 11609183 | Methods and systems to measure properties of products on a moving blade in electronic device manufacturing machines | Todd Egan, Edward W. Budiarto, Guoheng Zhao | 2023-03-21 |