Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733613 | Prediction of out of specification based on a spatial characteristic of process variability | Wenjin Huang, Hongmei Li, Huina Xu | 2023-08-22 |
| 11669020 | Method and apparatus for pattern fidelity control | Tanbir HASAN, Vivek Jain, Stefan Hunsche | 2023-06-06 |