Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842884 | Spatial monitoring and control of plasma processing environments | Denis Shaw, Daniel Carter | 2023-12-12 |
| 11610761 | Synchronization between an excitation source and a substrate bias supply | Denis Shaw, Daniel Carter | 2023-03-21 |