Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842884 | Spatial monitoring and control of plasma processing environments | Denis Shaw, Kevin Fairbairn | 2023-12-12 |
| 11615941 | System, method, and apparatus for controlling ion energy distribution in plasma processing systems | Victor Brouk, Daniel J. Hoffman | 2023-03-28 |
| 11610761 | Synchronization between an excitation source and a substrate bias supply | Kevin Fairbairn, Denis Shaw | 2023-03-21 |
| 11564985 | NSP10 self-assembling fusion proteins for vaccines, therapeutics, diagnostics and other nanomaterial applications | — | 2023-01-31 |