Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854842 | Substrate heat treatment apparatus | Hui Wang, Hongchao Yang, Wenjun Wang, Fuping Chen, Zhiyou Fang | 2023-12-26 |
| 11626297 | Apparatus and method for wet process on semiconductor substrate | Hui Wang, Xi Wang, Cheng-Liang Cheng | 2023-04-11 |