Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251043 | Method and structure for cutting dense line patterns using self-aligned double patterning | Lu Fan, Zi Qun Hua, Qingchen Cao, Yaobin Feng, Zhiliang Xia +1 more | 2022-02-15 |