Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Phillip Criminale, Zhiqiang Guo | 2022-06-21 |
| 11320850 | Voltage selection circuit | — | 2022-05-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Phillip Criminale, Zhiqiang Guo | 2022-06-21 |
| 11320850 | Voltage selection circuit | — | 2022-05-03 |