Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Zhiqiang Guo, Andrew Myles | 2022-06-21 |
| 11361948 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2022-06-14 |