Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378509 | Evaluation method for hydrogen-bearing components, porosity and pore size distribution of organic-rich shale | Min Wang, Jinbu Li, Chuanming Li, Shuangfang Lu | 2022-07-05 |
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Phillip Criminale, Andrew Myles | 2022-06-21 |
| 11361948 | Temperature measurement for substrate carrier using a heater element array | Phillip Criminale | 2022-06-14 |