Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11382180 | Multi-zone pedestal heater having a routing layer | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-07-05 |
| 11340121 | Heater element having targeted decreasing temperature resistance characteristics | Mark D. Everly, Jeremy Ohse, Sanhong Zhang | 2022-05-24 |
| 11343879 | Multi-zone pedestal heater without vias | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-05-24 |