Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11229968 | Semiconductor substrate support with multiple electrodes and method for making same | — | 2022-01-25 |
| 11222804 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same | Brent Donald Alfred Elliot, Frank Balma, Jason Stephens, Guleid Hussen | 2022-01-11 |