Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11222804 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same | Brent Donald Alfred Elliot, Frank Balma, Michael Parker, Guleid Hussen | 2022-01-11 |