Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495450 | Multiple zone heater | Alfred Grant Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex, Alexander Veytser | 2022-11-08 |
| 11331738 | High temperature resistant silicon joint for the joining of ceramics | Alfred Grant Elliot | 2022-05-17 |
| 11222804 | Electrostatic chuck for clamping in high temperature semiconductor processing and method of making same | Frank Balma, Michael Parker, Jason Stephens, Guleid Hussen | 2022-01-11 |