Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11268190 | Processes for depositing silicon-containing films using halidosilane compounds | Jianheng Li, John Francis Lehmann, Alan Charles Cooper | 2022-03-08 |
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao | 2022-03-08 |