Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380801 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2022-07-05 |
| 11268190 | Processes for depositing silicon-containing films using halidosilane compounds | Xinjian Lei, John Francis Lehmann, Alan Charles Cooper | 2022-03-08 |
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2022-03-08 |