Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Manchao Xiao, Xinjian Lei | 2022-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Manchao Xiao, Xinjian Lei | 2022-03-08 |