Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448543 | Quantity measurement device with detection unit contacting housing | Junzo Yamaguchi, Noboru Kitahara, Hiroshi Tagawa, Hiroyuki AKUZAWA | 2022-09-20 |
| 11315795 | Substrate processing method and substrate processing apparatus | Cedric Thomas | 2022-04-26 |
| 11217430 | Plasma processing apparatus and plasma processing method | Koji Koyama, Yasutaka Sakai | 2022-01-04 |