YS

Yasutaka Sakai

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
📍 Shioya, JP: #5 of 20 inventorsTop 25%
Overall (2022): #203,288 of 548,613Top 40%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11217430 Plasma processing apparatus and plasma processing method Masaki Inoue, Koji Koyama 2022-01-04