Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505878 | Diamond crystal substrate, method for producing diamond crystal substrate, and method for homo-epitaxially growing diamond crystal | Seongwoo Kim, Yuki KAWAMATA, Naoki Fujita | 2022-11-22 |
| 11217430 | Plasma processing apparatus and plasma processing method | Masaki Inoue, Yasutaka Sakai | 2022-01-04 |