MS

Miho Satou

UL Ulvac: 1 patents #13 of 49Top 30%
Overall (2022): #327,726 of 548,613Top 60%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11421315 Sputtering target and method of producing sputtering target Xiaoli Lu, Junichi Nitta, Akira Nakamura 2022-08-23