Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517999 | Polishing apparatus and polishing method | — | 2022-12-06 |
| 11435968 | Method for information processing apparatus, information processing apparatus, and method for communication system | Yoshinori Yamaguchi | 2022-09-06 |
| 11421315 | Sputtering target and method of producing sputtering target | Xiaoli Lu, Junichi Nitta, Miho Satou | 2022-08-23 |
| 11416190 | Information processing apparatus, control method, and non-transitory computer-readable storage medium storing program | — | 2022-08-16 |
| 11376704 | Method of identifying trajectory of eddy current sensor, method of calculating substrate polishing progress, method of stopping operation of substrate polishing apparatus, method of regularizing substrate polishing progress, program for executing the same, and non-transitory recording medium that records program | — | 2022-07-05 |
| 11331764 | Polishing device, polishing method, and non-transitory computer readable medium | — | 2022-05-17 |
| 11305272 | Ion exchanger filled cartridge and metal removing column | Noriko TAKADA | 2022-04-19 |