XL

Xiaoli Lu

UL Ulvac: 1 patents #13 of 49Top 30%
Overall (2022): #207,604 of 548,613Top 40%
1
Patents 2022

Issued Patents 2022

Patent #TitleCo-InventorsDate
11421315 Sputtering target and method of producing sputtering target Junichi Nitta, Akira Nakamura, Miho Satou 2022-08-23