Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424142 | Bonding system with cleaning apparatus for cleaning non-bonding surface of substrate | Hiroshi Maeda, Satoshi Nishimura | 2022-08-23 |
| 11315789 | Method and structure for low density silicon oxide for fusion bonding and debonding | Kiyotaka Imai, Hirokazu Aizawa, Hiroshi Maeda, Kaoru Maekawa, Harunobu Suenaga | 2022-04-26 |