Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473182 | Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component | Koji Mitsuhashi | 2022-10-18 |
| 11424142 | Bonding system with cleaning apparatus for cleaning non-bonding surface of substrate | Yuji Mimura, Hiroshi Maeda | 2022-08-23 |