Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473182 | Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component | Satoshi Nishimura | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473182 | Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component | Satoshi Nishimura | 2022-10-18 |