Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486043 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor | Shigeru Nakajima, Katsushige Harada, Yusuke TACHINO | 2022-11-01 |
| 11260433 | Cleaning method of substrate processing apparatus and substrate processing apparatus | Daisuke Suzuki, Hiroyuki Hayashi, Sena FUJITA, Tatsuya MIYAHARA, Jyunji ARIGA +1 more | 2022-03-01 |