Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486043 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor | Yoshihiro TAKEZAWA, Shigeru Nakajima, Katsushige Harada | 2022-11-01 |