Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260433 | Cleaning method of substrate processing apparatus and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Sena FUJITA, Jyunji ARIGA +1 more | 2022-03-01 |