Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Yasushi Takiguchi, Yoshiki Okamoto, Hayato Hosaka | 2022-12-20 |
| 11287798 | Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate | Masashi Enomoto | 2022-03-29 |