Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508580 | Method for forming mask pattern, storage medium, and apparatus for processing substrate | Takashi Yamauchi, Shinichiro KAWAKAMI | 2022-11-22 |
| 11287798 | Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate | Teruhiko Kodama | 2022-03-29 |