Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Yasushi Takiguchi, Teruhiko Kodama, Yoshiki Okamoto | 2022-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Yasushi Takiguchi, Teruhiko Kodama, Yoshiki Okamoto | 2022-12-20 |