Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11455436 | Predicting across wafer spin-on planarization over a patterned topography | Mark H. Somervell | 2022-09-27 |
| 11456185 | Planarization of semiconductor devices | Mark H. Somervell, Corey Lemley | 2022-09-27 |
| 11262657 | System and method of planarization control using a cross-linkable material | Michael A. Carcasi, Mark H. Somervell | 2022-03-01 |