Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11474028 | Systems and methods for monitoring one or more characteristics of a substrate | Mark H. Somervell, Joshua Hooge, Masahide Tadokoro | 2022-10-18 |
| 11339733 | Systems and methods to monitor particulate accumulation for bake chamber cleaning | Mark H. Somervell | 2022-05-24 |
| 11276157 | Systems and methods for automated video analysis detection techniques for substrate process | Joel Estrella, Joshua Hooge | 2022-03-15 |
| 11262657 | System and method of planarization control using a cross-linkable material | Ryan L. Burns, Mark H. Somervell | 2022-03-01 |