Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538684 | UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly | Ian J. Brown, Ihsan Simms, Ainhoa Romo Negreira, Kathleen Nafus | 2022-12-27 |
| 11474028 | Systems and methods for monitoring one or more characteristics of a substrate | Michael A. Carcasi, Joshua Hooge, Masahide Tadokoro | 2022-10-18 |
| 11455436 | Predicting across wafer spin-on planarization over a patterned topography | Ryan L. Burns | 2022-09-27 |
| 11456185 | Planarization of semiconductor devices | Ryan L. Burns, Corey Lemley | 2022-09-27 |
| 11339733 | Systems and methods to monitor particulate accumulation for bake chamber cleaning | Michael A. Carcasi | 2022-05-24 |
| 11262657 | System and method of planarization control using a cross-linkable material | Michael A. Carcasi, Ryan L. Burns | 2022-03-01 |